Experimental Analysis of the Gas Film Damping Effect in an Aerostatic Guideway under Microscale

This article studies the mechanism of gas film damping on the aerostatic guideway system at a microscale with the modified Reynolds equation. The slide film damping force due to the fluid viscous effect is calculated, and the squeeze damping force caused by the gas compression and escape between two plates is analyzed. The damping ratio in the calculation model for the slide film damping is compared with the calculated results from the experiment and the finite element analysis results. Using the results of the study, the optimal supply pressure is designed. The method applied in this article provides the theoretical basis for the analysis and solution of the dynamic performance of an aerostatic guideway.