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脉冲激光LGA法钛表面氮化及其XRD和SEM微观分析
引用本文:宋宙模,吴嘉达.脉冲激光LGA法钛表面氮化及其XRD和SEM微观分析[J].四川激光,1994,15(4):151-157.
作者姓名:宋宙模  吴嘉达
作者单位:西北工业大学应用物理系,复旦大学分部复旦大学物理系
摘    要:用调Q-YAG和XeCl脉冲激光在钛表面以激光气体合金化方法生成氮化钛层,用X射线衍射仪分析了不同激光能量、不同N2气压不同作用脉冲数等条件下TiN的结晶取向、结晶形态、氮化程度,用扫描电镜观察了它们的微观结构,对脉冲激光的LGA法机理进行了探讨,也发现了用LGA法对Mo的氮化生成Mo2N.

关 键 词:  氮化  氮化钛  脉冲激光  LGA法

Surface nitridation of titanium using pulse laser gas alloying method and its microstructure analysis with XRD and SEM
Song Zhoumo Cai Meng GuoZhao.Surface nitridation of titanium using pulse laser gas alloying method and its microstructure analysis with XRD and SEM[J].Laser Journal,1994,15(4):151-157.
Authors:Song Zhoumo Cai Meng GuoZhao
Abstract:TiN layers are generated on titanium surface using laser gas alloying(LGA)method with Q-switched YAG laser and XeCl excimer laser.The growth orientation of crystalinzation morphology and degree of nitridation of titanuium un-der different conditions such as laser power densities ,N_2 pressures and pulse num-bers of irradiation are analysed with X-ray diffractometer.The microstructures of TiN are investigated with scanning electron microscope and then the mechanism of LGA is discussed from the fact of experiments. Mo_2N layer on molybdenum are pro-duced using the same method.
Keywords:laser gas alloying  surface nitridation  structure analysis of TiN layer
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