| 一种高纯气体微量水微量氧自动检测装置 |
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| 引用本文： | 石成英,陈宏建,乔立永. 一种高纯气体微量水微量氧自动检测装置[J]. 现代电子技术, 2008, 31(11): 133-135 |
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| 作者姓名： | 石成英 陈宏建 乔立永 |
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| 作者单位： | 第二炮兵工程学院,陕西,西安,710025 |
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| 摘 要： | 介绍了一种具有实时在线测量功能的高纯气体微量水微量氧自动检测装置,详细阐述了该装置的结构组成和性能特点,包括装置的硬件系统、软件系统、主要技术指标及研制过程中解决的关键技术和创新点。实践表明,此微量水微量氧自动检测装置成本较低、性能稳定可靠、精度较高,实现了小型化、自动化和智能化。
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| 关 键 词： | 高纯气体 微量水 微量氧 自动检测 |
| 文章编号： | 1004-373X(2008)11-133-02 |
| 修稿时间： | 2007-11-12 |
Trace Moisture and Trace Oxygen Automatic Testing Equipment in High-purity Gas |
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| SHI Chengying,CHEN Hongjian,QIAO Liyong. Trace Moisture and Trace Oxygen Automatic Testing Equipment in High-purity Gas[J]. Modern Electronic Technique, 2008, 31(11): 133-135 |
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| Authors: | SHI Chengying CHEN Hongjian QIAO Liyong |
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| Abstract: | This paper describes a real-time and on-line automatic testing equipment for trace moisture and trace oxygen in high-purity gas,the frame and performance characteristics of the equipment are discussed in detail,including hardware system,software systems,main specifications,the key technologies and innovations resolved in the research process.Through practice,this trace moisture and trace oxygen automatic testing equipment with a low cost,reliable performance and high precision realized miniaturization,automation and intelligent. |
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| Keywords: | high-purity gas trace moisture trace oxygen automatic testing |
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