微机械电磁阻尼结构分析

提出采用电磁阻尼结构来提高微机械角度调节装置的响应速度.通过建立结构模型和分析结构参数对阻尼效果的影响,给出具体设计实例以及制作工艺,证实该阻尼结构的有效性和可行性.

ANALYSIS ON MICRO-MACHINED ELECTROMAGNETIC DAMPING STRUCTURE

Microstructures with quick responding time do have advantages over conventional applications.An electromagnetic damping structure was used to increase the responding time of micro-machined angle tunable devices.The structural model consisted of a plate suspended by two supporting beams and closed coils.The closed coils produced the damping force when the plate rotated in the magnetic field.The damping force could be calculated by the law of electromagnetic induction.By means of classic dynamical equation of motion,the relationship between the damping factor and the parameters of the plate as well as the coils was analyzed.The results show that the damping factor increases to a stable value with the ratio of length to width and decreases as the thickness of the plate rises.The results also show that the damping factor increases to a stable value with the width of the coil and decreases as the thickness of the coil rises.Based on the theoretical analysis,the optimum parameters of the structure were decided.The comparison between the structure with and without damping coils was made.The calculated results show that the responding time is greatly reduced by means of the damping coils.A successful fabrication process of an application device proved the effectiveness and feasibility of this structure.