基于图像处理的晶体生长直径检测技术

针对单晶硅生长过程中的直径测量,提出一种“不在同一条直线上的三点确定圆”的直径测量算法.首先对获取到的单晶生长图像进行图像预处理,提取单晶体的边缘信息,然后基于“不在同一条直线上的三点确定圆”的原理,对部分“释热光环”提取特征点,从而获取硅单晶直径像素值,再通过量纲转化把直径像素值转化为长度值.试验表明,该算法获得的硅单晶直径的准确率满足直径检测系统的要求.

Diameter Detection for Crystals Growth Based on Image Processing

An on-line image measurement algorithm,three points which are not in a straight line determining the circle,is provided to measure the diameter of crystal growing.The image edge of the crystal is detected by image processing technology.The principle of the measurement algorithm above mentioned is done to extract feature points to some of the ptroelectric rings.Therefore,the crystal diameter pixel value is obtained,then the crystal diameter pixel value is transformed to the length value by the dimensional transformation.The experiment shows that the accurate rate of crystal diameter obtained by this algorithm meets the requirement of diameter detecting system.