| 用于空间弱磁场检测的自旋阀型GMR传感器 |
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| 引用本文： | 金磊,刘小磐,宋东东. 用于空间弱磁场检测的自旋阀型GMR传感器[J]. 微处理机, 2013, 0(5): 6-9 |
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| 作者姓名： | 金磊 刘小磐 宋东东 |
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| 作者单位： | [1]重庆理工大学,重庆400050 [2]湖南大学材料科学与工程学院,长沙410082 |
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| 摘 要： | 采用离子束溅射及光刻工艺,在衬底硅片上制备了结构为Ta/NiFeCoCu/NiFeCo/FeMn/Ta的自旋阀型多层膜磁阻单元,然后采用四个磁阻单元构成惠斯通电桥,形成磁敏感元件,进而研制GMR传感器.介绍了自旋阀GMR传感器的结构和工作原理,研究了该传感器的特性,实验结果表明：该自旋阀线性度好、灵敏度高,可作为航天器进行宇宙空间微弱磁场测量的重要仪器.
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| 关 键 词： | 离子束溅射 自旋阀 磁阻 弱磁场测量 |
Spin Valve GMR Sensor for Weak Magnetic Field Detection in Aerospace |
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| JIN Lei,LIU Xiao-pan,SONG Dong-dong. Spin Valve GMR Sensor for Weak Magnetic Field Detection in Aerospace[J]. Microprocessors, 2013, 0(5): 6-9 |
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| Authors: | JIN Lei LIU Xiao-pan SONG Dong-dong |
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| Affiliation: | 1.Chongqing Universuty of Technology, ChongQing 400050, China;College of Materials Science and Engineering,Hunan University,Changsha 410082,China;) |
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| Abstract: | The spin valve （with multilayer films structure） magnetic reluctance unit,consisting of Ta/NiFeCoCu/NiFeCo/FeMn/Ta,is prepared by ion beam and photoetching technology.Four units constitutes Wheatstone bridge to make the magneto-dependent element for manufacturing the GMR senor.This paper introduces the structure and operational principle of the spin valve GMR senor and discusses its characteristic.The test results show that the spin valve GMR senor can be used to measure the feebleness magnetic field for spacecraft in aerospace because of the great linearity and high sensibility. |
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| Keywords: | Ion beam sputter Spin valves Magnetic reluctance Weak magnetic field detection |
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