| 类金刚石膜的结构与性能研究 |
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| 引用本文： | 程宇航,吴一平.类金刚石膜的结构与性能研究[J].硅酸盐学报,1997,25(4):452-457. |
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| 作者姓名： | 程宇航 吴一平 |
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| 作者单位： | 华中理工大学材料科学与工程系 |
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| 基金项目： | 华中理工大学塑性成型模拟及模具技术国家重点实验室资助 |
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| 摘 要： | 用激光Ｒａｍａｎ谱和ＸＲＤ谱对用直流－射频等离子体化学气相沉积法制备的类金刚石膜的结构进行了分析，并研究了工艺参数对膜的沉积速率，内应力和直流电阻率的影响，结果表明，类金刚石膜是由ｓｐ＾２和ｓｐ＾３键组成的非晶态碳膜，当负偏压高于３００Ｖ时，膜中ｓｐ＾３／ｓｐ＾２键的比值随负偏压的升高而降低，类金刚膜的沉积速率与负偏压Ｖｂ的成正比，膜内存在１～４．７ＧＰａ的压应力，随负偏压的升高而降低，膜的电阻率
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| 关 键 词： | 类金刚石膜 化学气相沉积 结构 性能 金刚石薄膜 |
THE STRUCTURE AND PROPERTIES OF DIAMOND LIKE CARBON FILMS |
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| Cheng Yuhang,Wu Yiping,Chen Jianguo,Qiao Xueliang,Xie Changsheng.THE STRUCTURE AND PROPERTIES OF DIAMOND LIKE CARBON FILMS[J].Journal of The Chinese Ceramic Society,1997,25(4):452-457. |
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| Authors: | Cheng Yuhang Wu Yiping Chen Jianguo Qiao Xueliang Xie Changsheng |
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| Abstract: | Diamond like carbon films were deposited from C 2H 2 and Ar plasma in a direct current radio frequency plasma reactor. The films were characterized by X ray diffraction and Raman spectroscopy. Dependence of deposition rate, residual stress and D C electrical resistivity on deposition process were investigated. Diamond like carbon films are amorphous carbon films containing sp 2 and sp 3 bonding. Increasing substrate negative bias, the sp 3/sp 2 ratio decreases gradually, stress decreases linearly and D C electrical resistivity increases at first and then decreases with sp 2/sp 3 ratio rapidly. |
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| Keywords: | diamond like carbon films direct current radio frequency plasma chemical vapour deposition structure properties |
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