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硅微Z轴谐振陀螺仪闭环伺服控制系统设计
引用本文:夏敦柱,周百令. 硅微Z轴谐振陀螺仪闭环伺服控制系统设计[J]. 测控技术, 2007, 26(1): 1-3,6
作者姓名:夏敦柱  周百令
作者单位:东南大学,仪器科学与工程系,江苏,南京,210096;东南大学,仪器科学与工程系,江苏,南京,210096
基金项目:国家高技术研究发展计划(863计划) , 国防预研项目
摘    要:根据自行设计的硅微Z轴谐振陀螺仪的工作原理,提出了闭环伺服控制系统模型,在对开环检测模型分析的基础上设计了闭环伺服控制系统,并用Matlab软件对闭环伺服系统的频域和时域特性进行了仿真分析,选取了合适的校正环节及优化参数,使系统有较高的稳定裕度和较好的动态特性.通过实验调试实现了初始检测电容差引起的信号以及正交信号的反馈抑制控制,达到了较高的控制精度.

关 键 词:硅微Z轴陀螺仪  闭环伺服控制  校正环节
文章编号:1000-8829(2007)01-0001-03
修稿时间:2006-03-15

Design of Silicon Micromechanical Z-Axis Gyroscope Closed-Loop Servocontrol System
XIA Dun-zhu,ZHOU Bai-ling. Design of Silicon Micromechanical Z-Axis Gyroscope Closed-Loop Servocontrol System[J]. Measurement & Control Technology, 2007, 26(1): 1-3,6
Authors:XIA Dun-zhu  ZHOU Bai-ling
Affiliation:Department of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
Abstract:According to self-design silicon micromechanical Z-axis gyroscope, the closed-loop servocontrol system construction is presented. Based on open-loop detection analysis, a closed-loop servo control structure is designed. By simulating and analyzing the servo control system frequency and time domain characteristics, appropriate regulation modules and optimal parameters are selected to make the system have a high stable margin and excellent dynamic performance. The original capacitance difference and cross-coupling signal are well restrained to reach a reliable control accuracy through the experimental test.
Keywords:silicon micromechanical Z-axis gyroscope   closed-loop servocontrol   regulation module
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