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掺杂Ti对Fe-N薄膜结构与磁性的影响
引用本文:王合英,姜恩永,白海力,吴萍,刘明升.掺杂Ti对Fe-N薄膜结构与磁性的影响[J].金属学报,1996(11).
作者姓名:王合英  姜恩永  白海力  吴萍  刘明升
作者单位:天津大学,天津大学应用物理系
基金项目:国家自然科学基金,中关村联合测试基金,天津市21世纪青年科学基金
摘    要:用对向靶溅射仪制备出含多量Fe(16)N2相的(Fe,Ti)-N薄膜,研究了掺杂Ti对Fe-N薄膜结构与磁性的影响,在溅射Fe-N薄膜时加入适量的Ti可提高Fe-N薄膜中Fe(16)N2相的含量.Ti含量(原子分数)在0—25%时薄膜饱和磁化强度均高于纯Fe的值;Ti浓度为10%时,薄膜磁化强度高达2.68T,比纯Fe的饱和磁化强度值高20%.

关 键 词:对向靶溅射,Fe_(16)N_2薄膜,Ti掺杂,磁性,结构

EFFECTS OF Ti DOPING ON THE STRUCTURE AND MAGNETIC PROPERTY OF Fe-N FILMS
WANG Heying, JIANG Enyong,BAI Haili,WU Ping,LIU Mingsheng.EFFECTS OF Ti DOPING ON THE STRUCTURE AND MAGNETIC PROPERTY OF Fe-N FILMS[J].Acta Metallurgica Sinica,1996(11).
Authors:WANG Heying  JIANG Enyong  BAI Haili  WU Ping  LIU Mingsheng
Abstract:Fe,Ti)-N films with high content of Fe16N2 phase are prepared by facing target sputtering. Influences of doped titanium content on the structure and magnetic properties of Fe-N films are investigated. According to XRD and TEM results, optimum Ti additions enhance the formation of the 16:2 nitride, the values of saturation magnetization Bs for (Fe,Ti)-N films with Ti atomic fraction of 0 25% are larger than that for pure bcc iron, the maximum value for Bs is 2.68 T for the sample with 10% Ti, this value is 20% larger than that for pure bcc iron.
Keywords:facing target sputtering  Fe16N2 thin film  Ti doping  magnetic property  structure  
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