微机电器件的稳健设计

微机电系统（MEMS）是一个新兴的跨学科研究领域，成本和可靠性是MEMS商品化的关键。与传统的机械加工和IC加工相比，MEMS加工的尺寸偏差比较大，而且很难控制，因此需要在设计过程中充分考虑加工的不确定性。稳健设计可以在不提高制造成本的前提下提高设计方案的稳健性。稳健优化设计方法主要包括 Taguchi方法和基于容差模型的方法,后者特别适合于处理带约束的优化设计问题。以微加速度计和微阀为例给出了稳健设计在MEMS设计中的应用，验证了稳健设计可以显著提高MEMS器件的信噪比。

Robust design for MEMS devices

Microelectromechanical Systems (MEMS) offer an emerging and multidisciplinary research area. Cost and reliability are essential to the commercialization of MEMS. As compared with mechanical machining and IC fabrication, micromachining has the disadvantage of large and intractable dimensional uncertainty, which should be accommodated during design process. Robust design improves the robustness of designs in the presence of uncertainty without having to increase manufacturing cost. Robust optimization design approaches can be classified into two major categories, namely Taguchi method and tolerance-based method. The latter is better suit for constrained optimization. Case studies of a micro-accelerometer and a micro-valve are introduced to illustrate the validation of robust optimization design for MEMS devices, where signal-noise ratios are improved significantly.