Ferroelectric Lead Zirconate Titanate Films Prepared by Spray Pyrolysis of Carboxylate Solutions

Ferroelectric PbTi_0.6Zr_0.4O₃films 0.5–1.5 m in thickness were produced on platinum substrates by spray pyrolysis of carboxylate solutions. The optimized compositions of the precursor solutions, containing methacrylic acid and ethylene glycol, are stable under normal conditions, allow the annealing temperature to be reduced, and lead to higher quality film surfaces and large grains. The film exhibit the following electrical properties: T _C= 360–460°C, _max= 1750 at T _C, tan = 0.02–0.1 at 1 kHz and room temperature, P _{s max} = 18 C/cm², P _{r max} = 15 C/cm²at 50 Hz, and E _c= 42–120 kV/cm.