复合式MEMS微夹持器研制

研制了一种针对亚毫米微小构件实施稳定夹取及可靠释放的微夹持器，应用MEMS体硅工艺将静电梳齿驱动与真空驱动集成构成复合式驱动，设计了微夹持器静电驱动控制系统以及真空控制系统。在80V的驱动电压下，微夹持器末端夹爪位移25μm。设计了两种尺寸的微夹持器，一种张合量为100µm～150µm，另一种为150µm～200µm。针对100～200µm的小球进行了微操作实验，实验结果证明静电梳齿驱动结合真空吸附能够使夹取操作更加稳定，基于闭环控制的正压气流能有效克服小球与夹爪之间的粘附力，实现了可靠的释放操作。

Hybrid-type MEMS microgripper

This work is focused on design and fabrication of a hybrid-type electrostatic silicon microgripper integrated vacuum tool. Vacuum tools are integrated in this novel microgripper in order to improve its pick and place capability. Bulk micromachining technology is employed to fabricate the microgripper from single crystal silicon wafer. The gas circuit controlling and electrical subsystems are designed for the microgripper controlling. At a driving voltage of 80V, a deflection of 25μm at the arm tip of the gripper is achieved. Two different dimensions of the grippers are designed. One gripper is able to pick and place objects of a size ranging from 100μm to 150μm and the other is able to operate objects ranging from 150μm to 200μm.The objects ranging from 100μm to 200μm are picked and placed successfully in the experiment, the experiment indicate that this microgripper can realize the steady manipulation.