| 磁性陶瓷靶材的制备及其应用研究 |
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| 引用本文： | 徐小玉,黄之德,赵玉涛. 磁性陶瓷靶材的制备及其应用研究[J]. 真空, 2007, 44(3): 72-74 |
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| 作者姓名： | 徐小玉 黄之德 赵玉涛 |
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| 作者单位： | 1. 江苏常州轻工职业技术学院,江苏,常州,213164
2. 江苏大学材料科学与工程学院,江苏,镇江,212013 |
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| 基金项目： | 江苏省铝基复合材料工程研究中心研发项目 |
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| 摘 要： | 薄膜制备过程中溅射靶材的利用率很低,导致薄膜材料制备成本很高。以自制的高纯度纳米晶镍钴锌/二氧化硅复合铁氧体粉体为原料,冷等静压后高温烧结制备得到铁氧体复合靶材。用XRD、EPMA和SEM分析靶材的化学成分和微观形貌。结果表明：靶材为尖晶石型铁氧体和二氧化硅的复合材料,收缩率达14.37%,能在高真空多功能磁控溅射仪正常工作,并成功制备得到性能良好的软磁薄膜。整个制备过程工艺简单,操作方便可行,大大降低了靶材的制备成本。
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| 关 键 词： | 磁性陶瓷靶材 冷等静压 收缩率 软磁性能 |
| 文章编号： | 1002-0322（2007）03-0072-03 |
| 修稿时间： | 2006-09-05 |
Preparation and application of soft magnetic ceramic target |
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| XU Xiao-yu,HUANG Zhi-de,ZHAO Yu-tao. Preparation and application of soft magnetic ceramic target[J]. Vacuum(China), 2007, 44(3): 72-74 |
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| Authors: | XU Xiao-yu HUANG Zhi-de ZHAO Yu-tao |
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| Affiliation: | 1. Changzhou institute of light industry technology, Changzhou 213164, china ; 2. School of Material Science and Engineering, diangsu University, Zhenjiang 212013, china |
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| Abstract: | The target were prepared with composites by CIP(cold isostatic pressing)and sintered at high temperature.XRD and SEM are used to characterize the target.The results show that the target is a composite of NiCoZn,ferrite and SiO2.The shrinkage ratio of target is 14.37% and the target can work normally in HV multifunction magnetron sputtering to deposit the soft magnetic film successfully on silicon substrate.The whole preparation process of the target is simple and at low cost. |
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| Keywords: | magnetic ceramic target CIP shrinkage ratio soft magneticsm |
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