Fabrication and dynamic analysis of the electrostatically actuated MEMS variable capacitor |
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| Authors: | Dong-Ming Fang Xiang-Meng Jing Pei-Hong Wang Yong Zhou Xiao-Lin Zhao |
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| Affiliation: | (1) Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, 200030 Shanghai, People’s Republic of China |
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| Abstract: | Future microwave networks require miniature high-performance tunable elements such as switches, inductors, and capacitors. In this paper, high performance variable capacitor was fabricated by simple microelectromechanical systems (MEMS) technology. The capacitance and quality (Q) factor at 1 GHz are 0.792 pF and 51.6. The pull-in voltage is 13.5 V and the tuning ratio of the capacitor is more than 1.31:1. A reduced-order model for the dynamic characteristics of the capacitor is established based on the equilibrium among the plate flexibility. |
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