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激光测径仪温度测量误差修正的研究
引用本文:康志远,吴定祥,陈浩,曾凯,唐立军.激光测径仪温度测量误差修正的研究[J].测控技术,2017,36(5):100-103.
作者姓名:康志远  吴定祥  陈浩  曾凯  唐立军
作者单位:1. 长沙理工大学物理与电子科学学院,湖南长沙,410114;2. 长沙亿旭机电科技有限公司,湖南长沙,410000;3. 长沙湘鸿仪器机械制造有限责任公司,湖南长沙,410002
基金项目:国家科技支撑计划项目(2014BAH28F04);湖南省科技重大专项(2013FJ1004-3);湖南省教育厅科学研究项目重点项目(15K009);湖南省教育厅科学研究项目一般项目(14C0031)
摘    要:针对激光测径仪随温度变化而易造成测径误差的问题,采取了线性补偿和非线性补偿相结合的温度误差修正方案.研究了温度与误差数据的关系,通过给激光管加热,测试在温度影响下激光测径仪的误差数据.针对误差数据建立线性补偿和非线性补偿相结合的修正方案,设计了相应的温度误差修正系统.研究结果表明,经过温度误差补偿后,激光测径仪的精度大大提高,最大相对误差由修正前的0.39%减小到修正后的0.04%,且随着温度的变化,测量数据无明显波动.

关 键 词:半导体激光器  激光测径  误差修正

Research on Temperature Measurement Error Correction in Laser Diameter Measuring Instrument
KANG Zhi-yuan,WU Ding-xiang,CHEN Hao,ZENG Kai,TANG Li-jun.Research on Temperature Measurement Error Correction in Laser Diameter Measuring Instrument[J].Measurement & Control Technology,2017,36(5):100-103.
Authors:KANG Zhi-yuan  WU Ding-xiang  CHEN Hao  ZENG Kai  TANG Li-jun
Abstract:In order to solve the problem of temperature variation influence on the error of laser diameter measuring instrument,a scheme of temperature error correction combining linear compensation and nonlinear compensation is adopted.The relationship between temperature and error data is studied,through heating the laser tube,the error data of laser diameter detector influenced by temperature are tested.A modified scheme combining linear and nonlinear compensation is established according to error data,and the corresponding temperature error correction system is designed.Research results show that the accuracy of the laser diameter measuring instrument is improved greatly after temperature error compensation,maximum relative error is decreased from 0.39% before correction to 0.04% after correction.With the change of temperature,the measured data have no significant fluctuations.
Keywords:semiconductor laser  laser measurement  error correction
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