| 内表面等离子体浸没离子注入过程的数值模拟 |
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| 引用本文： | 刘爱国,王小峰,汤宝寅,王松雁,田修波,曾照明,朱剑豪. 内表面等离子体浸没离子注入过程的数值模拟[J]. 哈尔滨工业大学学报, 2000, 32(1): 111-115 |
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| 作者姓名： | 刘爱国 王小峰 汤宝寅 王松雁 田修波 曾照明 朱剑豪 |
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| 作者单位： | 1. 哈尔滨工业大学,现代焊接生产技术国家重点实验室,黑龙江,哈尔滨,150001
2. 香港城市大学 物理及材料学系,香港 |
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| 摘 要： | 采用流体模型对圆筒内表面PIII过程进行了二维数值模拟,研究了筒内鞘层扩展和交叉重叠对内表面注入的注入能量和注入剂量的影响.通过模拟发现,内表面注入过程存在注入能量和注入剂量偏低的问题,但前者并不十分严重,而后者则比较严重.在鞘层发生交叉重叠后筒内出现的高能离子流对注入能量和注入剂量偏低的问题有改善作用.
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| 关 键 词： | 等离子体浸没 离子注入 内表面改性 数值模拟 |
| 文章编号： | 0367-6234(2000)01-0111-05 |
| 修稿时间： | 1998-11-12 |
Numerical simulation of plasma immersion Ion implantation |
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| LIU Ai-guo,WANG Xiao-feng,TANG Bao-yan,WANG Song-yan,TIAN Xiu-bo,ZENG Zhao-ming. Numerical simulation of plasma immersion Ion implantation[J]. Journal of Harbin Institute of Technology, 2000, 32(1): 111-115 |
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| Authors: | LIU Ai-guo WANG Xiao-feng TANG Bao-yan WANG Song-yan TIAN Xiu-bo ZENG Zhao-ming |
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| Affiliation: | LIU Ai-guo,WANG Xiao-feng,TANG Bao-yan,WANG Song-yan,TIAN Xiu-bo,ZENG Zhao-ming(hdvanced Welding Production Technology National Key Lab, Harbin Institute of Technology, Harbin 150001, China) |
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| Abstract: | Inner surface strengthening of deliberate parts has been a difficult task in the field of surface modification.Plasma immersion ion implantation (PIII), unrestricted by sight-light process, is considered a suitable way fordeliberate inner surface strengthening. Inner surface PIII process was simulated using two-dimensional fluid model,and the influence of sheath expansion and overlapping in the bore on impact energy and retained dose of inner surfacewas investigated. Lower impact energy and retained dose were found in inner surface PIII, but the former wasnot very serious, while the latter was. Tne ion flux with high energy appeared after sheath overlapping in the boremade impact energy and retained dose better. |
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| Keywords: | plasma immersion ion implantation inner surface modification plasma sheath simulation |
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