| 压阻式加速度计双端固支梁结构的设计与分析 |
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| 引用本文： | 王伟,郝雁. 压阻式加速度计双端固支梁结构的设计与分析[J]. 传感器与微系统, 2003, 22(10): 30-32 |
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| 作者姓名： | 王伟 郝雁 |
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| 作者单位： | 中国电子科技集团公司,第四十九研究所,黑龙江,哈尔滨,150001 |
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| 摘 要： | 介绍一种压阻式加速度计双端固支梁的结构,并建立其三维实体有限元模型。分析了在惯性载荷作用下的弹性梁的应力及应变,并对弹性结构进行了模态分析。讨论影响灵敏度、固有频率等主要指标的因素,用有限元方法进行分析、模拟,以达到优化设计的目的。
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| 关 键 词： | 压阻式加速度计 弹性梁 双端固支梁 有限元分析 |
| 文章编号： | 1000-9787(2003)10-0030-03 |
| 修稿时间： | 2003-05-22 |
Design and analysis of a two-end fixed beam structure of piezoresistive accelerometer |
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| Abstract: | The two end fixed beam structure of piezoresistive accelerometer was introduced, and 3D solid FEA model was built. Stress and strain of elastic beam under inertial load was analyzed, and modal analysis of elastic structure was figured out. Also factors which can affect the sensitivity and natural frequency were discussed, analysis and simulation were made with FEA to achieve optimized design. |
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| Keywords: | piezoresistive accelerometer elastic beam two-end fixed beam FEA |
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