| 功能-结构一体化NiCr/NiSi薄膜热电偶的制备 |
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| 引用本文： | 王从瑞,蒋洪川,陈寅之,张万里,刘兴钊,唐磊,于浩.功能-结构一体化NiCr/NiSi薄膜热电偶的制备[J].测控技术,2011,30(10):1-4. |
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| 作者姓名： | 王从瑞 蒋洪川 陈寅之 张万里 刘兴钊 唐磊 于浩 |
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| 作者单位： | 1. 电子科技大学电子薄膜与集成器件国家重点实验室,四川成都,610054
2. 中国燃气涡轮研究院测控室,四川江油,621703 |
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| 摘 要： | 采用多层薄膜结构制备了NiCr/NiSi薄膜热电偶,该薄膜热电偶依次由Ni基超合金基片、NiCrAlY过渡层、Al2O3热氧化层、Al2O3绝缘层、NiCr/NiSi薄膜热电偶层以及Al2O3保护层构成.主要研究了热电偶层薄膜厚度和时效处理对热电偶性能的影响以及温度对Al2O3绝缘层绝缘性的影响.静态标定结果表明,热电...
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| 关 键 词： | NiCr/NiSi薄膜热电偶 时效处理 Seebeck系数 相对灵敏度 |
| 收稿时间： | 2010/11/8 0:00:00 |
Fabrication of NiCr/NiSi Thin Film Thermocouples With the Incorporating Function and Structure |
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| WANG Cong-rui,JIANG Hong-chuan,CHEN Yin-zhi,ZHANG Wan-li,LIU Xing-zhao,TANG Lei and YU Hao.Fabrication of NiCr/NiSi Thin Film Thermocouples With the Incorporating Function and Structure[J].Measurement & Control Technology,2011,30(10):1-4. |
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| Authors: | WANG Cong-rui JIANG Hong-chuan CHEN Yin-zhi ZHANG Wan-li LIU Xing-zhao TANG Lei and YU Hao |
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| Affiliation: | State Key Lab of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China;State Key Lab of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China;State Key Lab of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China;State Key Lab of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China;State Key Lab of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China;Testing Department of China Gas Turbine Establishment;Testing Department of China Gas Turbine Establishment |
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| Abstract: | NiCr/NiSi multilayer thin film thermocouples are fabricated.The samples are multilayer structure which is composed of Ni-based superalloy substrates,NiCrAlY buffer layer,thermal grown Al_2O_3 layer,Al_2O_3 insulating layer,NiCr/NiSi thin film thermocouple layer and Al_2O_3 protecting layer.The influences of thickness of NiCr/NiSi thermocouple layer and the ageing treatment on the thermoelectrical properties are explored in detail. The influences of temperature on the perpendicular resistance of Al_2O_3 insu... |
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| Keywords: | NiCr/NiSi thin film thermocouples ageing treatment Seebeck coefficient relative sensitivity |
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