| 一种毫微米级进给机构几个问题的研究 |
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| 引用本文： | 李尚平,张鸿海.一种毫微米级进给机构几个问题的研究[J].中国机械工程,1993,4(1):19-21. |
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| 作者姓名： | 李尚平 张鸿海 |
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| 作者单位： | 华中理工大学
(李尚平，张鸿海，孙桂静，谢良富，陈日曜)，华中理工大学(师汉民) |
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| 摘 要： | 通过建模的方法对所研制的一种毫微米级微进给机构的原理进行了分析,结合实验结果提出了有关结构参数的设计要点。并从动静态的角度分析了其定位精度的影响因素,提出了减少误差、提高系统稳定性的措施。
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| 关 键 词： | 微动装置 结构 设计 仪器 精度 |
A Study on Several Problems About a Nanometer-scale Microfeed Device |
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| Li Sbangping.A Study on Several Problems About a Nanometer-scale Microfeed Device[J].China Mechanical Engineering,1993,4(1):19-21. |
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| Authors: | Li Sbangping |
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| Affiliation: | Li Sbangping |
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| Abstract: | In this paper,principles of the nanometer scale microfeed device are studied by modelling method.Some critical design points and design parameters are discribed with experimental results.Static and dynamic positioning errors afe analyzed.Some effective ways improving sys-temetic stability and reducing the positioning errors are proposed. |
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| Keywords: | microfeed device structure design instrument precision |
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