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Formation of a step-free InAs quantum well selectively grown on a GaAs (111)B substrate
Authors:Toshio Nishida  Naoki Kobayashi
Affiliation:(1) NTT Basic Research Laboratories, 3-1, Morinosato Wakamiya, Atsugi-shi, 243-01 Kanagawa, Japan
Abstract:We investigated the possibility of forming a step-free quantum well structure. A step-free InAs monolayer was grown on a selectively grown mesa by controlling surface phases with in-situ monitoring of surface photo-absorption. We selectively grew a GaAs buffer at 800°C and cooled the sample keeping the (2×2)-like As stabilized surface. Atomic force microscopy (AFM) observation demonstrated that fully step-free surfaces were formed on the 8 μm wide mesa. Then, a monolayer-thick InAs was formed on this step-free surface and this InAs layer was capped by GaAs under the (2×2)-like condition. The quantum level of the step-free InAs layer was evaluated by spatially resolved photoluminescence (μPL) measurement. Uniform PL intensity and the lack of a double layer peak indicated the formation of a step-free InAs quantum well, which was in good agreement with AFM observation.
Keywords:(111)B  GaAs  metalorganic vapor phase epitaxy (MOVPE)  selective growth  surface photo-absorption  two-dimensional nucleation
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