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Design and performance test of a two-axis fast steering mirror driven by piezoelectric actuators
Authors:FANG Chu  GUO Jin  YANG Guo-qing  JIANG Zhen-hu  XU Xin-hang  WANG Ting-feng
Affiliation:State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China;University of Chinese Academy of Science, Beijing 100049, China;State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China;State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China;University of Chinese Academy of Science, Beijing 100049, China;State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China;State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China;State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China
Abstract:A novel design of a two-axis fast steering mirror (FSM) with piezoelectric actuators is proposed for incoherent laser beam combination. The mechanical performance of the FSM is tested. The results show that the tilting range of the mirror is about 4 mrad, and the 1st-order resonance frequency is about 250 Hz. A self-designed grating encoder is taken as the sensor, which ensures the optimal precision of 10 μrad. The novel mechanical design can meet the requirement of engineering in incoherent laser beam combination.
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