Microscale Patterning of Mesoscopic PZN-PT Single Crystal Films by Crystal ion Slicing and Laser-Induced Etching |
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Authors: | Kee S Moon M Levy Yong K Hong H Bakhru S Bakhru |
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Affiliation: |
a Department of ME-EM, Michigan Technological University, Houghton, Michigan 49931, USA.
b Department of Physics, Michigan Technological University, Houghton, Michigan 49931, USA.
c Physics Department, SUNY at Albany, Albany, New York 12222, USA.
d Department of Biomedical Engineering, Columbia University, New York, New York 10027, USA. |
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Abstract: | Advances in the fabrication of solid-solution single crystal relaxor ferroelectrics have made it possible to produce highly efficient piezoelectric crystals, and have attracted renewed interest in the use of these crystals for a new generation of piezoelectric transducers, actuators and sensors. Of particular interest is their incorporation into micro-electromechanical systems (MEMS). In this paper we report on the laser-induced wet chemical etching of lead zinc niobate-lead titanate (PZN-PT) in hydrochloric acid (HCl). Argon-ion laser radiation at power levels up to 4 W is focused to a spot diameter of about 15μm and results in the chemical etching of grooves at patterning speeds up to 5μm/sec. Crystal ion slicing, an ion-implant-based film separation technique, is used in combination with laser etching to form 5 to 10μm-thick patterned and freestanding films for incorporation into micro-electromechanical devices. |
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