Composite substrate material for surface acoustic-wave oscillator |
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| Authors: | Sean Wu Yeong-Chin Chen Maw-Shung Lee |
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| Affiliation: | (1) Department of Electronics and Information Engineering, Tung-Fang Institute of Technology, Hunei Shiang, 829 Kaohsiung, Taiwan, Republic of China;(2) Department of Electronic Engineering, National Kaohsiung University of Applied Sciences, 829 Kaohsiung, Taiwan, Republic of China |
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| Abstract: | Surface acoustic-wave (SAW) oscillators have advantageous features compared with other technologies. The Y-128° LiNbO3 is a well-known, high electromechanical-coupling SAW material, but its usefulness is limited because of its poor temperature-stability
property. The AlN films have some excellent characteristics, such as high SAW velocity, stable chemical properties, and high-temperature
stability. In this research, different thickness AlN films were sputtered on Y-128° LiNbO3 to be a composite substrate for the SAW oscillator. As AlN film thickness increased, the temperature coefficient of frequency
(TCF) value of the oscillator varied from −76.32 ppm/°C to −28.81 ppm/°C giving an improvement in the TCF of 62.25%. The oscillator
frequency at 25°C also varied from 40.0909 MHz to 41.6221 MHz, giving an improvement in the oscillator frequency of 3.8%.
The composite substrate (AlN/Y-128° LiNbO3) can enhance the oscillator frequency and effectively improve the poor temperature stability for the SAW oscillator. |
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| Keywords: | Sputtering AlN Y-128° LiNbO3 TCF oscillator |
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