| 高性能微惯性器件单片集成技术 |
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| 引用本文： | 张照云,施志贵,张 慧,彭 勃.高性能微惯性器件单片集成技术[J].太赫兹科学与电子信息学报,2014,12(4):622-626. |
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| 作者姓名： | 张照云 施志贵 张 慧 彭 勃 |
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| 作者单位： | a. Institute of Electronic Engineering；b. Laboratory of Precision Manufacturing Technology, China Academy of Engineering Physics, Mianyang Sichuan 621999, China;a. Institute of Electronic Engineering；b. Laboratory of Precision Manufacturing Technology, China Academy of Engineering Physics, Mianyang Sichuan 621999, China;a. Institute of Electronic Engineering；b. Laboratory of Precision Manufacturing Technology, China Academy of Engineering Physics, Mianyang Sichuan 621999, China;a. Institute of Electronic Engineering；b. Laboratory of Precision Manufacturing Technology, China Academy of Engineering Physics, Mianyang Sichuan 621999, China |
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| 基金项目： | 中国工程物理研究院科学技术发展基金重点课题(20111A0403017) |
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| 摘 要： | 讨论了高性能微惯性器件单片集成技术。首先对单片集成MEMS技术的优势及面临的困难进行了讨论,并对目前主流的单片集成MEMS技术特点、工艺流程进行了介绍,最后,给出高性能微惯性器件单片集成技术的未来发展趋势。
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| 关 键 词： | 微机电系统 单片集成 微惯性器件 表面微机械加工 体硅微机械加工 |
| 收稿时间： | 2013/7/24 0:00:00 |
| 修稿时间： | 2013/9/13 0:00:00 |
Monolithic integration technology of high-performance micro-inertial devices |
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| ZHANG Zhao-yun,SHI Zhi-gui,ZHANG Hui and PENG Bo.Monolithic integration technology of high-performance micro-inertial devices[J].Journal of Terahertz Science and Electronic Information Technology,2014,12(4):622-626. |
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| Authors: | ZHANG Zhao-yun SHI Zhi-gui ZHANG Hui and PENG Bo |
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| Affiliation: | ZHANG Zhao-yun;SHI Zhi-gui;ZHANG Hui;PENG Bo;Institute of Electronic Engineering,China Academy of Engineering Physics;Laboratory of Precision Manufacturing Technology,China Academy of Engineering Physics; |
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| Abstract: | The monolithic integration technology of high-performance micro-inertial device is presented. Firstly, the advantages and difficulties faced by the technology of monolithic integration MEMS(Micro-Electro-Mechanical Systems) are discussed. Secondly, the features and the process of the mainstream monolithic integration MEMS technology are introduced. Finally, a forecast is put forward on the future trends of high-performance micro-inertial device. |
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