| 提拉单晶炉自动引晶技术的研究 |
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| 引用本文： | 何晔,佘建军,付昌禄,李金,宋晓佳,武欢,李海林,母江东,邓力. 提拉单晶炉自动引晶技术的研究[J]. 压电与声光, 2014, 36(1): 97-99 |
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| 作者姓名： | 何晔 佘建军 付昌禄 李金 宋晓佳 武欢 李海林 母江东 邓力 |
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| 作者单位： | 中国电子科技集团公司第26研究所，重庆 400060 |
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| 摘 要： | 该文从人工引晶工艺流程入手,结合提拉法单晶炉已有技术和温度测控技术,使用计算机编程技术和传感器测量技术完成人工引晶的各项步骤,实现了提拉法单晶炉引晶技术的全自动化,从而实现真正意义上的全自动单晶炉。
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| 关 键 词： | 提拉法单晶炉 引晶 提拉法(CZ) 红外测温 上称重 |
Study on the Auto seeding Technique with Czochralski Crystal Grower |
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| HE Ye,SHE Jianjun,FU Changlu,LI Jing,SONG Xiaoji,WU Huan,LI Hailing,MU Jiangdong and DENG Li. Study on the Auto seeding Technique with Czochralski Crystal Grower[J]. Piezoelectrics & Acoustooptics, 2014, 36(1): 97-99 |
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| Authors: | HE Ye SHE Jianjun FU Changlu LI Jing SONG Xiaoji WU Huan LI Hailing MU Jiangdong DENG Li |
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| Affiliation: | 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China |
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| Abstract: | Based on the process flow of manual seeding,and combining with the available crystal grower technique and temperature control technique,the full automation of the seeding technique with Czochralski crystal grower has been realized by using the computer programming and the sensor measuring technology to carry out the every procedure of the manual seeding. Thus the full auto crystal grower has been realized. |
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| Keywords: | Czochralski crystal grower seeding CZ method IR temperature measurement Up weighing |
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