首页 | 本学科首页   官方微博 | 高级检索  
     

铟掺杂ZnO体单晶的生长及其性质
引用本文:张璠,赵有文,董志远,张瑞,杨俊. 铟掺杂ZnO体单晶的生长及其性质[J]. 半导体学报, 2008, 29(8): 1540-1543
作者姓名:张璠  赵有文  董志远  张瑞  杨俊
作者单位:中国科学院半导体研究所,北京 100083;中国科学院半导体研究所,北京 100083;中国科学院半导体研究所,北京 100083;中国科学院半导体研究所,北京 100083;中国科学院半导体研究所,北京 100083
摘    要:研究了In掺杂n型zno体单晶的化学气相传输法生长和材料性质.利用霍尔效应、x射线光电子能谱、光吸收谱、喇曼散射、阴极荧光谱等手段对晶体的特性和缺陷进行r分析.掺In后容易获得浓度为1018~lO19cm-3的n型ZnO单晶,掺人杂质的激活效率很高.随着掺杂浓度的提高,znO单晶的带边吸收和电学性质等发生明显的变化.分析了掺In-ZnO单晶的缺陷及其对材料性质的影响.

关 键 词:掺杂  化学气相传输  单晶
收稿时间:2008-02-10
修稿时间:2008-04-02

Bulk Single Crystal Growth and Properties of In-Doped ZnO
Zhang Fan,Zhao Youwen,Dong Zhiyuan,Zhang Rui and Yang Jun. Bulk Single Crystal Growth and Properties of In-Doped ZnO[J]. Chinese Journal of Semiconductors, 2008, 29(8): 1540-1543
Authors:Zhang Fan  Zhao Youwen  Dong Zhiyuan  Zhang Rui  Yang Jun
Affiliation:Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
Abstract:The Hall effect,XPS,optical absorption,Raman scattering,and cathode luminescence have been used to study the electrical properties,crystal quality,and defects of indium-doped bulk ZnO single crystals grown by the chemical vapor transport (CVT) method.Indium doped n-type ZnO single crystals with a carrier concentration of 1E18~1E19cm-3 have been obtained reproducibly by CVT.The doped indium exhibits high activation efficiency as a shallow donor in a ZnO single crystal.As doping concentration increases,the optical absorption and electrical properties of the In-ZnO change significantly.Defects and their influence on the In-ZnO single crystals have been analyzed.
Keywords:ZnO
本文献已被 CNKI 维普 万方数据 等数据库收录!
点击此处可从《半导体学报》浏览原始摘要信息
点击此处可从《半导体学报》下载全文
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号