| 溶胶－凝胶方法制备PZT铁电薄膜材料的研究 |
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| 引用本文： | 饶韫华,刘梅冬,卢春如,王培英,吴国安,曾亦可. 溶胶－凝胶方法制备PZT铁电薄膜材料的研究[J]. 功能材料, 1994, 0(6) |
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| 作者姓名： | 饶韫华 刘梅冬 卢春如 王培英 吴国安 曾亦可 |
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| 作者单位： | 华中理工大学固体电子学系 |
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| 摘 要： | 本文介绍了用ｓｏｌ－ｇｅｌ方法制备ＰＺＴ铁电薄膜的工艺，并指出采用快速热处理工艺能有效地防止薄膜开裂。比较了用３种不同锆盐原料制备的ＰＺＴ薄膜的性能。实验结果表明，用无机盐硝酸锆制备的ＰＺＴ铁电薄膜的性能最好。
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| 关 键 词： | 溶胶－凝胶法，铁电薄膜，钙钛矿结构 |
Research on the Preparation of PZT Ferroelectrics Thin Films by Sol-Gel Method |
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| Rao Yunhua, Liu Meidong, Lu Chunru, Wang Peiying, Wu Guoan, Zeng Yike. Research on the Preparation of PZT Ferroelectrics Thin Films by Sol-Gel Method[J]. Journal of Functional Materials, 1994, 0(6) |
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| Authors: | Rao Yunhua Liu Meidong Lu Chunru Wang Peiying Wu Guoan Zeng Yike |
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| Abstract: | This paper studied the sol-geltechnique to prepare PZT ferroelectric thin films,and pointed out that the adoption of rapid sinteringprocess could effectively prevent the thin films fromcracking. It compared the performances of the PZTthin films prepared with three different kinds ofzirconic salts.And the test result showed that thepe rformance of the PZT thin films prepared withinorganic Salt aitrate Zirconium was the best. |
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| Keywords: | sol-gel metbod ferroelectric thinfilms perovskite structure |
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