Multiple-input microcantilever sensors

A surface-micromachined micro-electro-mechanical-system (MEMS) process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Cantilever motion due to absorption-induced stress was readout using a custom-designed, eight-channel integrated circuit. Combined hydrogen and mercury vapor detection was achieved with a palm-sized, self-powered module with spread-spectrum telemetry reporting.