On the profile of frequency dependent series resistance and dielectric constant in MIS structure

In this study, the frequency dependent of the forward and reverse bias capacitance-voltage (C-V) and conductance-voltage (G/ω - V) measurements of Al/SiO₂/p-Si (MIS) structures are carried out in frequency range of 10 kHz-10 MHz. The frequency dependence of series resistance (R_s), density of surface states (N_ss), dielectric constant (ε′), dielectric loss (ε″), dielectric loss tangent (tan δ) and the ac electrical conductivity (σ_dc) are studied for these structure at room temperature. Experimental results show that both electrical and dielectric parameters were strongly frequency and voltage dependent. The ε′ and ε″ are found to decrease with increasing frequency while σ_ac is increased. Also, both the effects of surface states N_ss and R_s on C-V and G/ω - V characteristics are investigated. It has been seen that the measured C and G decrease with increasing frequency due to a continuous distribution of N_ss in frequency range of 10 kHz-1 MHz. The effect of R_s on the C and G are found noticeable at high frequencies. Therefore, the high frequencies C and G values measured under both reverse and forward bias were corrected for the effect of series resistance R_s to obtain real MIS capacitance C_c and conductance G_c using the Nicollian and Goetzberger technique. The distribution profile of R_s-V gives a peak in the depletion region at low frequencies and disappears with increasing frequencies.