Life stability of transparent semiconducting oxide films deposited onto cold substrates |
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| Authors: | N. Rücker K.J. Becker |
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| Affiliation: | W.C. Heraeus GmbH, D-6450 Hanau, F.R.G. |
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| Abstract: | The influence of the initial resistivity on the life stability of thin In2O3-SnO2 films deposited onto cold substrates was investigated. We tried to improve the life stability with protective layers. A method of producing thin films with low initial resistivities is presented and the influence of the substrate on the initial resistivity is described. |
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