Properties of stannic oxide thin films produced from the SnCl4-H2O and SnCl4-H2O2 reaction systems

Transparent and conductive stannic oxide films were produced at the relatively low temperature of 250°C from the SnCl₄-H₂O and SnCl₄-H₂O₂ reaction systems by a chemical vapour deposition method. The films were not doped with impurities. Films formed from the first system are superior to those formed from the second with respect to electrical properties although they have a lower deposition rate at the same deposition temperature. The former system gives rise to films with resistivities in the range 10–10^-3 Ω cm between 250 and 400°C. The latter system produces films with resistivities in the range 10²–10^-2 Ω cm between 250 and 450°C. The electrical properties depend on the absorption of hydrogen peroxide as well as on the grain size, which depends on the deposition temperature and the reaction system. The spectral transmissivity for films 0.36–1.1 μm thick varies over the range 80–95% in the regions between 400 and 650 nm for both systems. Different reaction mechanisms take place in different temperature regions for both systems since there are two activation energies in the plot of deposition rate as a function of temperature.