Fabrication of unbacked ultra-thin films of beryllium and other metals |
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Authors: | BJ Mulder |
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Affiliation: | Philips Research Laboratories, Eindhoven The Netherlands |
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Abstract: | A method is given for preparing ultra-thin unbacked metal films by evaporating the metal onto rock-salt platelets coated with a thin layer of a soluble thermoplastic resin. Beryllium films have been made with thickness ranging from 0.2 to 0.5 μm and free from “optical” pinholes. The beryllium was rapidly and continuously evaporated from a tungsten crucible with very little corrosion of the crucible. Deposition rates of 100 nm s-1 were achieved with a source-to-substrate distance of 140 mm. |
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