| Nd:YAG固体激光铣削单晶硅表面形貌研究 |
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| 引用本文： | 袁根福,曾晓雁. Nd:YAG固体激光铣削单晶硅表面形貌研究[J]. 应用激光, 2005, 25(3): 145-147 |
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| 作者姓名： | 袁根福 曾晓雁 |
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| 作者单位： | 1. 安徽建筑工业学院激光加工联合研究中心,合肥,230022
2. 华中科技大学激光技术国家重点实验室,武汉,430074 |
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| 基金项目： | 安徽省教育厅重点基金资助(课题编号2005KJ040ZD) |
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| 摘 要： | 利用体视显微镜和扫描电子显微镜观察Nd:YAG固体脉冲激光铣削的单晶硅表面形貌,利用能谱分析仪EDAX对铣削表面进行成分分析。不同功率密度的激光铣削的单晶硅表面形貌差别比较大,其表面化学成分也存在较大差别。
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| 关 键 词： | 激光铣削 单晶硅 表面形貌 |
| 收稿时间： | 2004-11-10 |
| 修稿时间： | 2004-11-10 |
Surface Appearance Study of Nd:YAG Solid Laser Milling on Single Crystal Silicon |
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| Yuan Genfu,Zeng Xiaoyan. Surface Appearance Study of Nd:YAG Solid Laser Milling on Single Crystal Silicon[J]. Applied Laser, 2005, 25(3): 145-147 |
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| Authors: | Yuan Genfu Zeng Xiaoyan |
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| Affiliation: | Yuan Genfu 1 Zeng Xiaoyan 2 |
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| Abstract: | The surface appearances of Nd:YAG solid laser milling on single crystal silicon were observed and analysed by using stereomicroscope and scan electron microscope , and the milling surface elements were studied by EDAX . The surface appearances of single crystal silicon were of difference with laser milling power density , and so the surface elements were. |
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| Keywords: | laser milling single crystal silicon surface appearance |
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