新型解复用接收器件的理论分析及实验研究

报道了本实验室对一镜斜置三镜腔光电探测器的理论分析以及实验研究方面的最新进展。一镜斜置三镜腔结构是一种新型高性能的光电探测器结构，其中斜镜的引入使得滤波腔与吸收腔之间解耦，因此这种结构的探测器可以同时获得高的量子效率、高的响应速率和窄的光谱响应线宽。在理论分析的基础上，利用化学湿法刻蚀，在器件集成的化的关键工艺－斜镜的制备上取得了突破，为最终实现具有该结构的集成器件奠定了基础。

Theoretical Analysis and Experimental Research of the Novel Wavelength-selective Photodetectors

Research advances in one mirror inclined three mirror cavity (OMITMC) photodetectors in our laboratory are reported. In the structure of these photodetectors, it is the inclined mirror that makes the filtering cavity and the absorption cavity decoupled, thus narrow spectral response linewidth, highspeed and high quantum efficiency can be achieved simultaneously. On the basis of the theoretical analysis, the built in inclined mirror, the key part in the whole integrated structure is realized by selective wet chemical etching. Moreover, the first integrated device of this type is under fabrication.