超精密装置PID振动控制系统的仿真研究

 在仿生啄木鸟头部独特生物构造和隔振机理的基础上，采用主动隔振技术建立了超精密装置隔振系统结构及动力学模型． 结合超精密装置隔振系统的结构特点和性能要求，采用闭环PID主动控制系统，用Matlab软件进行了仿真分析．仿真分析结果表明，该振动控制系统宽频率范围内具有良好的减振效果，该系统可应用于超精密\测量、超精密制造设备的隔振领域．

Design of PID vibration control system for ultra-precision device

To keep the ultra\|precision device from the micro\|disturbance of environment, a structure and kinetic model of a vibration control system were established with a passive air\|spring which reduces vibrations of high\|frequency area and a giant magnetostrictive actuator which reduces those of low\|frequency area, which is imitative of the isolation mechanics and special organic texture of woodpecker's brain. In consideration of complex vibration environment and nonlinear ultra\|precision device, a closed loop PID active control system was adopted. The system was simulated by Matlab. Results of simulations show that the control system can effectively restrain the disturbances whose frequency range form 0-100 Hz.It can be applied to the vibration isolation field of the ultra\|precision measuring and manufacturing device.