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半导体激光器腔面高反射涂层的研究
引用本文:杨晓妍,杨莲,王玉霞. 半导体激光器腔面高反射涂层的研究[J]. 长春理工大学学报(自然科学版), 1995, 0(3)
作者姓名:杨晓妍  杨莲  王玉霞
作者单位:长春光机学院近代光学研究所
摘    要:通过对GaAs-GaAlAs激光器谐振腔后腔面蒸镀ZrO2,MgF2工艺过程,从|理论和实验上分析涂层特性,反射率由无膜时的32%,镀膜后提高到92.5%。保护了器件端面,降低问值电流,提高了激光输出功率和工作寿命。

关 键 词:高反射膜  GaAlAs激光器  谐振腔

The Stady of the lsigh-reflective Coatings on Semiconductor laser Cavity surface
Yong Xiaoyan, Yang Lian, Wang Yuxia. The Stady of the lsigh-reflective Coatings on Semiconductor laser Cavity surface[J]. Journal of Changchun University of Science and Technology, 1995, 0(3)
Authors:Yong Xiaoyan   Yang Lian   Wang Yuxia
Affiliation:Changchun Institute of optics and Fine Mechanics
Abstract:We have studied theoretically and technology process of ZrO2 MgF2, evaporation experimen-tally the coating characteristics viathe plating on the back cavity surfaces of GaAs/GaAlAs laser. Thereflective coefficient have been changed from 32%, in the case without coating, to above 92%. Bythis, the device cavith surfaces have been protected, the output pawer increased, the lifetime extended,and threshold current reduced.
Keywords:High-reflectire coating  GaAlAs laser  resonant cavities  
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