Open-loop control of a MEMS deformable mirror for large-amplitude wavefront control |
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| Authors: | Stewart Jason B Diouf Alioune Zhou Yaopeng Bifano Thomas G |
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| Affiliation: | Department of Electrical and Computer Engineering, Boston University, Massachusetts 02215, USA. jstew@bu.edu |
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| Abstract: | A method is introduced for predicting control voltages that will generate a prescribed surface shape on a MEMS deformable mirror. The algorithm is based upon an analytical elastic model of the mirror membrane and an empirical electromechanical model of its actuators. It is computationally simple and inherently fast. Shapes at the limit of achievable mirror spatial frequencies with up to 1.5 microm amplitudes have been achieved with less than 15 nm rms error. |
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