| 基于叠片式柔性铰链和压电陶瓷电动机的大行程直线驱动导轨设计 |
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| 引用本文： | 石旭东,李健丽,王立文.基于叠片式柔性铰链和压电陶瓷电动机的大行程直线驱动导轨设计[J].制造技术与机床,2007(2):104-106. |
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| 作者姓名： | 石旭东 李健丽 王立文 |
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| 作者单位： | 1. 中国民航大学,天津,300300;中国民航航空地面特种设备研究基地,天津,300300
2. 中国民航大学,天津,300300 |
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| 摘 要： | 提出了一种叠片式柔性铰链导轨工作台,可以在保持柔性铰链微位移工作台高直线度的前提下,大幅度提高行程,同时还保持了柔性铰链微位移工作台无机械爬行现象的优点。采用压电陶瓷电动机作为叠片式柔性铰链工作台的驱动器,压电陶瓷电动机应用超声波驻波或行波驱动,具有定位精度高、行程大、频响高等优点,驱动分辨率可达20nm以下。
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| 关 键 词： | 柔性铰链 压电陶瓷电动机 超声波电动机 有限元 机械爬行 |
Design of Large Displacement and High Precision Linear Stage Based on Laminated Flexure Hinge and Ultrasonic Motor |
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| SHI Xudong,LI Jianli,WANG Liwen.Design of Large Displacement and High Precision Linear Stage Based on Laminated Flexure Hinge and Ultrasonic Motor[J].Manufacturing Technology & Machine Tool,2007(2):104-106. |
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| Authors: | SHI Xudong LI Jianli WANG Liwen |
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| Abstract: | A laminated flexure hinge stage is proposed in this paper. It could improve the ou tput displacement greatly while keeping the advantage of high linearity. The mec hanism could keep the advantage of flexure hinge of no mechanical creep. A PZT u ltrasonic motor is used as the driver of the laminated flexure hinge stage in th is paper. The PZT ultrasonic motor has the advantage of high position precision, large displacement and high frequency response. The PZT ultrasonic motor uses s tanding wave or traveling wave as its drive function, its resolution could reach 20nm. |
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| Keywords: | Laminated Flexure Hinge PZT Ultrasonic Motor Finite Element Method Mechanical Creep |
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