| 单晶圆兆声清洗技术研究及兆声喷头方案优化 |
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| 引用本文： | 刘永进,杜建科,冯小强. 单晶圆兆声清洗技术研究及兆声喷头方案优化[J]. 电子工业专用设备, 2011, 40(1): 15-17 |
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| 作者姓名： | 刘永进 杜建科 冯小强 |
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| 作者单位： | 中国电子科技集团公司第四十五研究所; |
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| 摘 要： | 基于单晶圆兆声清洗的原理,分析了针对单晶圆兆声清洗的多种方案的优缺点,提出了适合单晶圆兆声清洗的优化方案.
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| 关 键 词： | 单晶圆 兆声 清洗 |
Study of Single-wafer Megasonic Cleaning and Optimization of Megasonic Nozzle |
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| LIU Yongjin,DU Jianke,FENG Xiaoqiang. Study of Single-wafer Megasonic Cleaning and Optimization of Megasonic Nozzle[J]. Equipment for Electronic Products Marufacturing, 2011, 40(1): 15-17 |
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| Authors: | LIU Yongjin DU Jianke FENG Xiaoqiang |
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| Affiliation: | LIU Yongjin,DU Jianke,FENG Xiaoqiang (The 45th Research Institute of CETC,Beijing 101601,China) |
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| Abstract: | Based on the theory of single-wafer megasonic cleaning,measures are anlysised,and an improved measure is indicated. |
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| Keywords: | Single-wafer Megasonic Cleaning |
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