| 激光划切机的光束传递系统设计 |
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| 引用本文： | 高爱梅,韩微微,赵志伟.激光划切机的光束传递系统设计[J].电子工业专用设备,2011,40(2):16-19. |
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| 作者姓名： | 高爱梅 韩微微 赵志伟 |
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| 作者单位： | 中国电子科技集团公司第四十五研究所; |
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| 摘 要： | 针对LTCC激光划切机的光束传递系统,介绍了355 nm固体激光的扩束、聚焦原理、系统装调与精密调焦方法.该方法适用于激光加工设备的激光光束传递系统搭建,简单实用.
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| 关 键 词： | 激光加工 UV激光 激光聚焦 |
Beam Delivery System Design of Laser Dicing Equipment |
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| GAO Aimei,HAN Weiwei,ZHAO Zhiwei.Beam Delivery System Design of Laser Dicing Equipment[J].Equipment for Electronic Products Marufacturing,2011,40(2):16-19. |
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| Authors: | GAO Aimei HAN Weiwei ZHAO Zhiwei |
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| Affiliation: | GAO Aimei,HAN Weiwei,ZHAO Zhiwei(The 45th Research Institute of CETC,Beijing 101601,China) |
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| Abstract: | Be aim to the LTCC laser dicing equipment’s beam delivery system,this article introduce the 355nm laser expander and focalize principle、 assembly and adjusting method、precisely focusing method.This way is applied to beam delivery system design of laser machining equipment,simple and practicality. |
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| Keywords: | Laser machining UV laser Beam focalize |
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