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表面粗糙度的高精度非接触式测量
引用本文:王真,郭天太,周义偲,郑婧,陈欣,吴静天. 表面粗糙度的高精度非接触式测量[J]. 机械工程师, 2009, 0(4): 66-67
作者姓名:王真  郭天太  周义偲  郑婧  陈欣  吴静天
作者单位:中国计量学院,杭州,310018
摘    要:非接触式表面粗糙度测量以其高精度、无损伤、测量速度快等特点得到了广泛的应用。文中对光散射法、干涉法、散斑法、衍射投影法以及超声检测法等表面粗糙度测量方法的最新研究进展进行了总结介绍,论述了各测量方法的优缺点及发展趋势。

关 键 词:表面粗糙度  非接触式测量  高精度

Measuring Methods of Non-contact Surface Roughness
WANG Zhen,GUO Tian-tai,ZHOU Yi-si,ZHENG Jing,CHEN Xin,WU Jing-tai. Measuring Methods of Non-contact Surface Roughness[J]. Mechanical Engineer, 2009, 0(4): 66-67
Authors:WANG Zhen  GUO Tian-tai  ZHOU Yi-si  ZHENG Jing  CHEN Xin  WU Jing-tai
Affiliation:China JiLiang University;Hangzhou 310018;Chinia
Abstract:Non-contact measurement of surface roughness is widely used now due to its high precision, non-damage, high measuring speed, etc.This paper discusses the principles and advances of the methods of non-contact surface roughness measurement, such as scattering method, optical interference method, speckle method, laser diffraction pattern, and ultrasonic measurement, and the merits and shortcomings of these methods are also given.
Keywords:surface roughness  non-contact measurement  high precision  
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