一种基于空间光调制器的微透镜阵列制备技术

提出了一种基于空间光调制器的并行光刻制备微透镜阵列的技术。采用数字微反射镜器件输入光刻图形,结合热回流技术,制作任意结构和排布的微透镜阵列。无限远校正显微微缩光学系统的长焦深保证了深纹光刻的实现,热回流法提供了良好的表面光滑度。与传统逐层并行光刻和掩模曝光技术相比,提出的技术方案更加便捷灵活,特别适合制作特征尺寸在数微米至百微米的微透镜阵列器件。得到的微透镜阵列模版经过电铸转移为金属模具,利用紫外卷对卷纳米压印技术在柔性基底上制备微透镜阵列器件,在超薄液晶显示、有机发光二极管(OLED)照明等领域有广泛应用。

Fabrication of Microlens Arrays Based on Spatial Light Modulator

An approach of fabrication of microlens arrays using spatial light modulator based lithography method is proposed. Combined with themal reflow method, digital micro-mirror device is used to pattern microstructure, and microlens arrays with arbitrary structure and topology can be obtained. The patterns on thick photoresist layer are projected by an infinity-corrected optical system. Good surface quality can be realized by thermal reflow method. Compared with classical stereolithography and mask-based exposure lithography method, the proposed method has the advantage of low-cost and high efficiency, especially suitable for fabricating microlens arrays which feature size ranging from several micrometers to hundreds of micrometers. The obtained microlens array can be transferred to a nickel mold by quasi-lithography electrodeposition and modeling (LIGA) process, which can be used as an imprinting mold. The flexible microlens array film can find wide application in novel ultra-thin liquid crystal displays, organic light-emitting diodes (OLED), etc.