压电薄膜三维重载力传感器设计与实验

面向高性能轴承滚动体成型质量监控领域对重载多维高频强冲击载荷动态测量力传感器的急需，提出了一种基于PVDF压电薄膜三维重载力传感器新的结构形式及其测量原理，实现三维重载载荷动态测量。传感器敏感元件由上、中、下3层压电薄膜组组成，三维力变化引起每组不同面域切割的压电薄膜电荷量变化，从而实现三维力大小计算。传感器支撑壳体起到分载作用，从而实现重载载荷测量。对传感器样机进行了准静态标定实验，结果表明，该传感器具有较好的线性，非线性误差小于2%,能完成重载场合下的动态测量要求，为压电薄膜力传感器在重载多维载荷动态测量领域提供了重要的设计、研制及应用参考依据。

Design and experiment of PVDF piezoelectric film 3-D heavy load force sensor

Facing the urgent need of dynamic measuring force sensor for heavy load, multi-dimensional, high-frequency and strong impact load in the field of high-performance bearing rolling element forming quality monitoring, a new structural form and measurement principle of piezoelectric film three dimensional heavy load force sensor are proposed. The sensing element of the sensor is composed of upper, middle and lower piezoelectric films. The change of three-dimensional force causes the change of charge of piezoelectric films cut in different regions of each group, so as to realize the calculation of three-dimensional force. The sensor support shell plays the role of load sharing, so as to realize heavy load measurement. The quasi-static calibration experiment of the sensor prototype is carried out. The experimental results show that the sensor has the advantages of good linearity. The nonlinear error is less than 2%. It can meet the dynamic measurement requirement under heavy load. Therefore, it provides an important reference basis for the design, development and application of piezoelectric thin film force sensor in the field of heavy load multi-dimensional load dynamic measurement.