Compact ellipsometer employing a static polarimeter module with arrayed polarizer and wave-plate elements |
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Authors: | Sato Takashi Araki Takeshi Sasaki Yoshihiro Tsuru Toshihide Tadokoro Toshiyasu Kawakami Shojiro |
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Affiliation: | Photonic Lattice, Inc., Aoba Incubation Square, Aoba, Aramaki, Aoba-ku, Sendai 980-0845, Japan. sato@photonic-lattice.com |
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Abstract: | A portable ellipsometer with a compact static polarimeter using an arrayed polarizer, an arrayed wave plate, and a CCD image sensor is developed. A high level of repeatability at a measurement speed of 0.3 s is demonstrated by measurement of SiO(2) films ranging from 2 to 300 nm in thickness deposited on an Si wafer. There is the potential to realize an ultracompact ellipsometer module by integrating the optical source and receiver, suitable for deployment in a variety of manufacturing equipment and measurement instruments. |
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