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Micromachining by Focused Ion Beam (FIB) for Materials Characterization |
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| Authors: | P.&#x P. Jud,P.&#x M. Nellen,U. Sennhauser |
| Affiliation: | P. P. Jud,P. M. Nellen,U. Sennhauser |
| Abstract: | |
| Keywords: | Focused ion beam (FIB) Micromachining Microscopy |
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