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柔性衬底WOx-Mo薄膜电致变色性能研究
引用本文:范 芸,唐 武,翁小龙,邓龙江. 柔性衬底WOx-Mo薄膜电致变色性能研究[J]. 稀有金属材料与工程, 2009, 38(9): 1570-1574
作者姓名:范 芸  唐 武  翁小龙  邓龙江
作者单位:电子科技大学,电子薄膜与集成器件国家重点实验室,四川,成都,610054
摘    要:采用射频磁控溅射工艺,在镀有ITO薄膜的柔性PET衬底上低温制备WOx-Mo薄膜,利用电化学工作站测试薄膜的循环伏安曲线和计时电流曲线来分析薄膜的电致变色性能.结果表明:随Mo掺杂量的增加,薄膜的氧化峰峰位往电压正方向移动,并且氧化峰电流峰值增加,薄膜着色响应时间缩短,退色时间延长.当Mo掺杂量为15.4%时,着色时间最短达到4.53 s,退色时间最长达到9.8 s.薄膜的可逆性与电荷在薄膜中的滞留量有关,在Mo掺杂量为7.6%时,薄膜可逆性最好,达到51.2%左右,电荷滞留量为2.4E-3C.

关 键 词:电致变色  磁控溅射  WOx-Mo薄膜
收稿时间:2008-09-05

Electrochromic Properties of WOx-Mo Thin Films on Polyethylene Terephthalates Soft Substrate
Fan Yun,Tang Wu,Weng Xiaolong and Deng Longjiang. Electrochromic Properties of WOx-Mo Thin Films on Polyethylene Terephthalates Soft Substrate[J]. Rare Metal Materials and Engineering, 2009, 38(9): 1570-1574
Authors:Fan Yun  Tang Wu  Weng Xiaolong  Deng Longjiang
Affiliation:State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, Chin
Abstract:WOx-Mo thin films have been deposited on the ITO/PET substrates by RF magnetron sputtering. The electrochromic properties of films were investigated by cyclic voltammetry (C-V) and chronoamperometry (CA) methods. It is found that the maximum of oxidation current increases and the oxidation peaks move to plus potential with increasing Mo doping concentration. Furthermore, the coloring response time decreases and the bleaching response time increases with increasing Mo doping concentration in the experimental range. For the film doped 15.4% Mo, the oxidation current reaches the maximum and the coloring response time is 4.53 s, the bleaching response time is 9.8 s. Not all the samples exhibit good reversibility due to the charge left in the film. The best reversibility is 51.2 % in the WOx film doped 7.6% Mo
Keywords:electrochromism   magnetron sputtering   WOx-Mo film
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