| 静电驱动光开关的结构设计与驱动电压分析 |
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| 引用本文： | 贾翠萍,朱化凤. 静电驱动光开关的结构设计与驱动电压分析[J]. 半导体技术, 2010, 35(5): 440-442. DOI: 10.3969/j.issn.1003-353x.2010.05.006 |
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| 作者姓名： | 贾翠萍 朱化凤 |
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| 作者单位： | 中国石油大学(华东)物理科学与技术学院,山东,青岛,266555;中国石油大学(华东)物理科学与技术学院,山东,青岛,266555 |
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| 摘 要： | 对静电驱动光开关的驱动结构进行了研究分析,对比分析了采用平面下电极和倾斜下电极两种驱动结构光开关的驱动电压。采用倾斜下电极光开关的pull-in电压较低,在此基础之上,提出了一种双倾斜电极三明治驱动结构光开关。在微反射镜偏移相同距离时,该种驱动结构光开关的pull-in电压更低,从而能够更进一步地提高光开关的性能。
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| 关 键 词： | 光开关 驱动电压 静电驱动 |
Design of Electrostatic Actuator of Optical Switch and Analysis of Actuating Voltage |
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| Jia Cuiping,Zhu Huafeng. Design of Electrostatic Actuator of Optical Switch and Analysis of Actuating Voltage[J]. Semiconductor Technology, 2010, 35(5): 440-442. DOI: 10.3969/j.issn.1003-353x.2010.05.006 |
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| Authors: | Jia Cuiping Zhu Huafeng |
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| Abstract: | The actuator structure of electrostatic actuating optical switch is studied.Actuating voltage of optical switch is analyzed based on the slanted under electrode and the plane one respectively.The result shows that the optical switch with slanted under electrode has the lower pull-in voltage than that with plane electrode.Based on this,the sandwiched optical switch with double slanted electrodes is proposed.Pull-in voltage of this optical switch is further lower due to the same displacement of micro-mirror.So the performance of optical switch can be further improved by this double slanted electrodes actuator. |
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| Keywords: | optical switch actuating voltage electrostatic actuator |
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