TiCN涂层的制备及其微观结构和性能

采用直流磁控溅射法在AZ31镁合金上制备了TiCN涂层。采用X射线荧光光谱仪、扫描电镜和X射线衍射仪表征了涂层的化学成分、表面形貌和物相,并采用电化学阻抗谱、浸泡试验、显微硬度测试和磨损试验考察了基体偏压(?40、?60和?80 V)对涂层性能的影响。结果表明,涂层由TiCN和TiN组成。随着负偏压增大,涂层中Ti、C元素含量增加,N元素含量减小,而显微硬度提高,物相组成和择优取向发生变化。?60 V偏压下所制涂层的表面粗糙度最小,耐蚀性最好。3种偏压下所制涂层的摩擦因数均小于0.3,磨损率在10?6 mm3/(N·m)数量级。

Preparation of TiCN coating and its microstructure and properties

TiCN coatings were prepared on AZ31 Mg alloy by direct-current magnetron sputtering.Their chemical composition,surface morphology,and crystalline structure were characterized by X-ray fluorescence spectrometry,scanning electron microscopy,and X-ray diffractometry,and the effects on different biases(?40,?60,and?80 V)on their properties were studied by electrochemical impedance spectroscopy,immersion testing,microhardness testing,and wear testing.The results showed that the coatings are composed of TiCN and TiN.With the increasing of negative bias,the Ti and C contents of coating increase,the N content decreases,the microhardness increases,and the phase constitution and preferred orientation change.The coating prepared under?60 V bias has the smallest surface roughness and the best corrosion resistance.The coatings prepared under different biases had a friction factor less than 0.3 and a wear loss rate in the order of 10?6 mm3/(N·m).