| 利用严格耦合波方法研究多层介质膜光栅掩膜特性 |
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| 引用本文： | 万华,陈新荣,吴建宏.利用严格耦合波方法研究多层介质膜光栅掩膜特性[J].中国激光,2005,32(9):275-1280. |
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| 作者姓名： | 万华 陈新荣 吴建宏 |
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| 作者单位： | 苏州大学信息光学工程研究所,江苏,苏州,215006 |
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| 基金项目： | 国家863计划（2004AA849023）资助项目. |
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| 摘 要： | 从理论和实验上研究了多层介质膜光栅掩膜特性，用严格耦合波（RCW）法对由光栅掩膜槽形和多层膜介质基底引起的衍射效率的变化进行了理论分析，计算得出不同形貌下的光栅掩膜的反射0级光谱衍射效率分布。在实验检测方法上，采用了0级反射光衍射效率分布来进行槽形判断，并将实验结果和理论计算进行了对比。结果证明使用该方法研究光栅掩膜形貌在一定程度上是有效的。
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| 关 键 词： | 衍射与光栅 光栅掩膜检测 严格耦合波方法 多层介质膜 |
| 文章编号： | 0258-7025（2005）09-1275-06 |
| 收稿时间： | 2004-09-16 |
| 修稿时间： | 2004-12-16 |
Study on the Characteristics of Multilayer Dielectric Grating Profile by the Rigorous Coupled-Wave Method |
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| WAN Hua,CHEN Xin-rong,WU Jian-hong.Study on the Characteristics of Multilayer Dielectric Grating Profile by the Rigorous Coupled-Wave Method[J].Chinese Journal of Lasers,2005,32(9):275-1280. |
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| Authors: | WAN Hua CHEN Xin-rong WU Jian-hong |
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| Affiliation: | Institute of In formation Optical Engineering, Suzhou University , Suzhou , Jiangsu 215006, China |
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| Abstract: | The fabrication of multilayer dielectric gratings was theoretically and experimentally investigated.The rigorous coupled-wave(RCW) method was adopted to analyze the influence of gratings profile and multilayer dielectric stack on the diffraction efficiency.The spectral distributing of the zero order diffraction efficiency was used to judge the gratings profile.Detecting experiments have been conducted to compare the theoretical analyses,the results of this comparison may be helpful to instruct the detection of the gratings profile.This method was proved to be effective to detect the grating mask profile. |
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| Keywords: | diffraction and gratings detection of gratings mask rigorous coupled wave method multilayer dielectric stack |
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