砷化镓激光器脊型波导的制备

本文主要研究了用湿法腐蚀的方法制备砷化镓激光器脊型波导，具体研究了砷化镓（GaAs）、铟镓磷（ InGaP）、铝镓铟磷（AlGaInP）材料的腐蚀。本文还成功地配制了能同时腐蚀铟镓磷和铝镓铟磷材料的腐蚀液。我们还分析了腐蚀时间和腐蚀浓度对脊型形状和脊型深度的影响。最后，在合适的条件下，本文得到了合适的脊型深度和光滑的脊型表面，而且得到的脊型的陡直度很小。这些结果表明这些腐蚀液将有用于激光器的制备。

Fabrication of ridge waveguide of 808 nm GaAs-based laser diodes by wet chemical etching

The fabrication of ridge waveguide of 808 nm GaAs-based laser diodes by wet chemical etching is investigated. The etching behavior of GaAs, InGaP and AlGaInP in various solutions is evaluated. As a result, the etching solutions simultaneously corroding InGaP and AlGaInP layers are searched successfully. Effects of etching time and the concentration of mixtures on etching depth and the geometrical shape of ridge are analyzed. It is found that under proper conditions, appropriate etching depth and smooth surfaces can be obtained and the steep degree of pattern can be accepted, especially for wide ridge waveguide laser diodes.